Mechanical function at small scales is essential for localized and distributed interaction in haptics, robotics, and biomedical devices. Conventional MEMS offer precision, speed, and scalable fabrication but are limited in deformation and compliant interaction. Soft systems offer large deformation and compliance, yet their miniaturization and integration remain challenging.
This seminar explores two complementary approaches to expanding mechanical functionality at small scales. The first focuses on conventional MEMS, demonstrating how understanding and tailoring nonlinear behavior can extend their operating range and enhance mechanical response. The second turns to soft milli- and microsystems, addressing the challenges of miniaturizing electrohydraulic actuation and demonstrating its realization through wafer-level microfabrication.
The seminar concludes with a research vision for scalable soft microsystem platforms capable of localized and distributed mechanical interaction, opening new opportunities in haptics, robotics, and biomedical interfaces.
